Low-temperature co-firing of multilayer textured piezoelectric ceramics with inner electrodes

Publication Date
2019-03-05Filing Date
2013-02-01Inventor
Yan, Yongke
Priya, Shashank
Metadata
Show full item recordAbstract
Textured PMN-PZT fabricated by templated grain growth (TGG) method has a piezoelectric coefficient (d) of 3 to 5 times that of its random counterpart. By combining this TGG method with low-temperature co-firing ceramics (LTCC) techniques, co-fired multilayer textured piezoelectric ceramic materials with inner electrodes were produced at a temperature as low as 925° C., which silver could be used. Trilayer PMN-PZT ceramics prepared by this method show a strain increase of 2.5 times, a driving voltage decrease of 3 times, and an equivalent piezoelectric coefficient (d*) improvement of 10 to 15 times that of conventional random ceramic counterparts. Further, a co-fired magnetostrictive/piezoelectric/magnetostrictive laminate structure with silver inner electrode was also synthesized. The integration of textured piezoelectric microstructure with the cost-effective low-temperature co-fired layered structure achieves strong magnetoelectric coupling. These new materials have promising applications including as actuators, ultrasonic transducers, and use in energy harvesters.
Assignee
Virginia Tech Intellectual Properties, Inc.
Patent Number
10224476
Application Number
14376319
Primary/U.S. Class
Other/U.S. Class
CPC Class
C04B35/26
C04B35/493
C04B35/499
C04B35/64
C04B2235/3234
C04B2235/3236
C04B2235/3249
C04B2235/3279
C04B2235/3281
C04B2235/3284
C04B2235/787
H01L41/20
H01L41/0477
H01L41/083
H01L41/16
H01L41/1875
H01L41/273
H01L41/43
Patent Type
utility
Collections
- Virginia Tech Patents [689]