Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity
Viehland, Dwight D.
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It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.