Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity

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Date
2004-05-01
Author
Dong, Shuxiang
Bai, Feiming
Yan, Li
Cao, Hu
Li, Jiefang
Viehland, Dwight D.
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Abstract
It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.
URI
http://hdl.handle.net/10919/25282
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