Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process
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Processes for providing a durable glass dielectric layer on an electrically conductive substrate are disclosed. Also disclosed are electrostatic chucks made by the process that include an electrically conductive substrate coated with a layer of glass having a composition that includes 60 wt. % to 80 wt. % SiO.sub.2.
Virginia Tech Intellectual Properties, Inc.
- Virginia Tech Patents