Ion assisted deposition of multicomponent thin films

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dc.contributor.authorLi, Chen-Chungen
dc.contributor.committeechairDesu, Seshu B.en
dc.contributor.committeememberDillard, John G.en
dc.contributor.committeememberHendricks, Robert W.en
dc.contributor.committeememberCox, Daviden
dc.contributor.committeememberReynolds, William T. Jr.en
dc.contributor.departmentMaterials Engineering Scienceen
dc.date.accessioned2014-03-14T21:21:50Zen
dc.date.adate2005-10-20en
dc.date.available2014-03-14T21:21:50Zen
dc.date.issued1994-01-15en
dc.date.rdate2005-10-20en
dc.date.sdate2005-10-20en
dc.description.abstractA novel in-situ stress measurement technique to study the formation kinetics of multi component oxide thin films was developed and was applied to PbTiO₃. Single phase PbTi 0₃ thin films were formed from the reaction between films in the deposited PbO ITi0₂ multilayer. The film stoichiometry was accurately controlled by depositing individual layers of the required thickness. Development of film stresses associated with the formation of the product layer at the PbO/Ti0₂ interface of the multilayers was used to monitor growth rate of the PbTiO₃ layer. It was found that growth of the PbTiO₃ phase obeyed the parabolic law and the effective activation energy was estimated to be 108 kJ/mole. It is believed that the mechanism of this reaction was dominated by grain boundary diffusion of the participating cations.en
dc.description.degreePh. D.en
dc.format.extentxii, 124 leavesen
dc.format.mediumBTDen
dc.format.mimetypeapplication/pdfen
dc.identifier.otheretd-10202005-102831en
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-10202005-102831/en
dc.identifier.urihttp://hdl.handle.net/10919/40039en
dc.language.isoenen
dc.publisherVirginia Techen
dc.relation.haspartLD5655.V856_1994.L5.pdfen
dc.relation.isformatofOCLC# 30888329en
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subject.lccLD5655.V856 1994.L5en
dc.subject.lcshThin filmsen
dc.titleIon assisted deposition of multicomponent thin filmsen
dc.typeDissertationen
dc.type.dcmitypeTexten
thesis.degree.disciplineMaterials Engineering Scienceen
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen
thesis.degree.leveldoctoralen
thesis.degree.namePh. D.en

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