Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates
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Date
2008-02-01
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MDPI
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Description
Keywords
Technology, Chemistry, Analytical, Electrochemistry, Instruments & Instrumentation, Chemistry, microelectromechanical systems, microplate, van der Waals force, pull-in instability, microsensor, ENCAPSULATED POLYSILICON RESONATORS, ACTUATED NARROW MICROBEAMS, REDUCED-ORDER MODEL, ELECTROSTATIC MEMS, CIRCULAR PLATES, MODAL-ANALYSIS, TEMPERATURE, PRESSURE, BEHAVIOR, FIELD