Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates

TR Number
Date
2008-02-01
Journal Title
Journal ISSN
Volume Title
Publisher
MDPI
Abstract
Description
Keywords
Technology, Chemistry, Analytical, Electrochemistry, Instruments & Instrumentation, Chemistry, microelectromechanical systems, microplate, van der Waals force, pull-in instability, microsensor, ENCAPSULATED POLYSILICON RESONATORS, ACTUATED NARROW MICROBEAMS, REDUCED-ORDER MODEL, ELECTROSTATIC MEMS, CIRCULAR PLATES, MODAL-ANALYSIS, TEMPERATURE, PRESSURE, BEHAVIOR, FIELD
Citation