Surface inspection via projection interferometry

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Date
1988-05
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Optical Society of America
Abstract

Projection fringe interferometry provides a useful technique for nondestructive surface analysis. Two beam interferometric fringes were projected onto a block of aluminum whose surface had various types of grooves cut into it. The fringes were digitized and analyzed via an automatic fringe tracking algorithm. Three-dimensional topographical maps of the surface's microstructure are presented together with a statistical analysis of surface parameters including average roughness, height distributions, and the autocorrelation function.

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Roger W. Wygant, Silverio P. Almeida, and Oliverio D. D. Soares , "Surface inspection via projection interferometry," Appl. Opt. 27, 4626-4630 (1988). doi: 10.1364/AO.27.004626