Sensing performance of sub-100-nm vanadium oxide films for room temperature thermal detection applications

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dc.contributor.authorScott, E. A.en
dc.contributor.authorSingh, M. K.en
dc.contributor.authorBarber, J. P.en
dc.contributor.authorRost, Christina M.en
dc.contributor.authorIvanov, S.en
dc.contributor.authorWatt, J.en
dc.contributor.authorPete, D.en
dc.contributor.authorSharma, P.en
dc.contributor.authorLu, T. M.en
dc.contributor.authorHarris, C. T.en
dc.date.accessioned2024-01-22T14:40:19Zen
dc.date.available2024-01-22T14:40:19Zen
dc.date.issued2022-11-14en
dc.description.abstractVanadium oxide films are widely employed as thermal detectors in uncooled infrared detection systems due to their high temperature coefficient of resistance near room temperature. One strategy toward maximizing detectivity and reducing the thermal time constant in these systems is to minimize the system platform dimensions. This approach necessitates thinner film thicknesses (≪100 nm), for which there is little information regarding thermal sensing performance. Herein, we report on the sensitivity of reactively sputtered vanadium oxide thin film resistive thermometers nominally ranging from 100 to 25 nm and assess the influence of thermal annealing. We demonstrate that films in this minimum limit of thickness maintain a high temperature coefficient while additionally providing an enhancement in characteristics of the noise equivalent power.en
dc.description.versionPublished versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.doihttps://doi.org/10.1063/5.0123303en
dc.identifier.eissn1077-3118en
dc.identifier.issn0003-6951en
dc.identifier.issue20en
dc.identifier.orcidRost, Christina [0000-0002-6153-6066]en
dc.identifier.urihttps://hdl.handle.net/10919/117511en
dc.identifier.volume121en
dc.language.isoenen
dc.publisherAIP Publishingen
dc.rightsPublic Domain (U.S.)en
dc.rights.urihttp://creativecommons.org/publicdomain/mark/1.0/en
dc.titleSensing performance of sub-100-nm vanadium oxide films for room temperature thermal detection applicationsen
dc.title.serialApplied Physics Lettersen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten
dc.type.otherJournal Articleen
pubs.organisational-group/Virginia Techen
pubs.organisational-group/Virginia Tech/Engineeringen
pubs.organisational-group/Virginia Tech/Engineering/Materials Science and Engineeringen
pubs.organisational-group/Virginia Tech/All T&R Facultyen
pubs.organisational-group/Virginia Tech/Engineering/COE T&R Facultyen

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