The Testing and Verification of a Nanomembrane Based Pressure Sensor for Small-Scale Underwater Pressure Measurements

A MEMS piezoresistive pressure sensor provides a low-cost and accurate means of detecting and quantifying small-scale disturbances in underwater environments. A highly sensitive MEMS pressure sensor has been developed that can be packaged in two different ways – one in a cylindrical housing, and the other in a flexible, yet robust, strip configuration – enabling more freedom for the user to choose an option that fits their needs. The sensing element of each consists of four piezoresistive elements in a Wheatstone Bridge configuration arranged on a deformable buried-oxide layer, which is then bonded to a Silicon base layer with a hollow cavity carved using reactive-ion etching. Previous work has shown the survivability of these sensors in an underwater environment and also measurements of low frequency pressure changes due to flow and varying turbulence intensities. The present work is focused on evaluating these pressure sensors and testing the limits of the sensing element in the low, medium, and high frequency regime (<100Hz to >1kHz) to gain further insight into the performance. Five experimental tests were developed and conducted to guide this research objective. The sensor responses under different flow conditions were measured and analyzed with selected filtering and resampling techniques to eliminate background noises. First, the sensors were calibrated to ensure their linearity and to determine their pressure sensitivities. Then, using bench-top testing rigs and a water tunnel, the sensor performance was evaluated in submerged environments when subjected to multiple small-scale flow disturbances across the tested frequency regime. It was found that the present sensors are capable of providing more accurate measurements across a tested frequency regime of 0 to 20,000Hz when compared to other off-the-shelf products. Testing in submerged environment showed that the sensors are capable of detecting small-scale pressure fluctuations as a result of eddies which are evident in a Von Karman vortex street and a turbulent flow. Despite the presence of EMI noise within a water tunnel, the sensors demonstrated a decay of pressure fluctuations that is consistent with previous research in the field. Overall, the present work increases understanding of the sensors' performances across a broad range of frequencies and provides insight into potential uses and future work.