Development of an Advanced Semiconductor Laboratory

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dc.contributor.authorBemben, Richard Matthewen
dc.contributor.committeecochairMeehan, Kathleenen
dc.contributor.committeecochairHendricks, Robert W.en
dc.contributor.committeememberTront, Joseph G.en
dc.contributor.departmentElectrical and Computer Engineeringen
dc.date.accessioned2014-03-14T20:37:44Zen
dc.date.adate2005-06-28en
dc.date.available2014-03-14T20:37:44Zen
dc.date.issued2005-05-04en
dc.date.rdate2005-06-28en
dc.date.sdate2005-05-20en
dc.description.abstractEngineering faculty and administration at the Virginia Polytechnic Institute and State University (Virginia Tech) have recognized the importance of producing competent scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has been actively pursued for several years. This paper details the development of an advanced semiconductor processing laboratory course, which serves as a three credit hour capstone course. The course covers circuit layout, semiconductor fabrication, and electrical testing. The following steps were taken in order to accomplish this task: choosing and customizing a computer aided design (CAD) software package for device layout, pMOS process integration on the toolset in the cleanroom facilities at Virginia Tech, and the development of a laboratory manual.en
dc.description.degreeMaster of Scienceen
dc.identifier.otheretd-05202005-165204en
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-05202005-165204/en
dc.identifier.urihttp://hdl.handle.net/10919/33031en
dc.publisherVirginia Techen
dc.relation.haspartThesis_Bemben.pdfen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectsemiconductor processingen
dc.subjectVTPMOSen
dc.subjectadvanced laboratoriesen
dc.titleDevelopment of an Advanced Semiconductor Laboratoryen
dc.typeThesisen
thesis.degree.disciplineElectrical and Computer Engineeringen
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen
thesis.degree.levelmastersen
thesis.degree.nameMaster of Scienceen

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