Stochastic dynamics of micron-scale doubly clamped beams in a viscous fluid

We study the stochastic dynamics of doubly clamped micron-scale beams in a viscous fluid driven by Brownian motion. We use a thermodynamic approach to compute the equilibrium fluctuations in beam displacement that requires only deterministic calculations. From calculations of the autocorrelations and noise spectra we quantify the beam dynamics by the quality factor and resonant frequency of the fundamental flexural mode over a wide range of experimentally accessible geometries. We consider beams with uniform rectangular cross section and explore the increased quality factor and resonant frequency as a baseline geometry is varied by increasing the width, increasing the thickness, and decreasing the length. The quality factor is nearly doubled by tripling either the width or the height of the beam. Much larger improvements are found by decreasing the beam length, however this is limited by the appearance of additional modes of fluid dissipation. Overall, the stochastic dynamics of the wider and thicker beams are well predicted by a two-dimensional approximate theory beyond what may be expected based upon the underlying assumptions, whereas the shorter beams require a more detailed analysis. © 2009 The American Physical Society.