Mode-dependent scaling of nonlinearity and linear dynamic range in a NEMS resonator

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dc.contributor.authorMa, M.en
dc.contributor.authorWelles, N.en
dc.contributor.authorSvitelskiy, O.en
dc.contributor.authorYanik, C.en
dc.contributor.authorKaya, I. I.en
dc.contributor.authorHanay, M. S.en
dc.contributor.authorPaul, Mark R.en
dc.contributor.authorEkinci, K. L.en
dc.date.accessioned2024-10-07T17:54:52Zen
dc.date.available2024-10-07T17:54:52Zen
dc.date.issued2024-08-20en
dc.description.abstractEven a relatively weak drive force is enough to push a typical nanomechanical resonator into the nonlinear regime. Consequently, nonlinearities are widespread in nanomechanics and determine the critical characteristics of nanoelectromechanical systems' (NEMSs) resonators. A thorough understanding of the nonlinear dynamics of higher eigenmodes of NEMS resonators would be beneficial for progress, given their use in applications and fundamental studies. Here, we characterize the nonlinearity and the linear dynamic range (LDR) of each eigenmode of two nanomechanical beam resonators with different intrinsic tension values up to eigenmode n = 11. We find that the modal Duffing constant increases as n4, while the critical amplitude for the onset of nonlinearity decreases as 1 / n . The LDR, determined from the ratio of the critical amplitude to the thermal noise amplitude, increases weakly with n. Our findings are consistent with our theory treating the beam as a string, with the nonlinearity emerging from stretching at high amplitudes. These scaling laws, observed in experiments and validated theoretically, can be leveraged for pushing the limits of NEMS-based sensing even further.en
dc.description.versionAccepted versionen
dc.format.extent7 page(s)en
dc.format.mimetypeapplication/pdfen
dc.identifierARTN 083505 (Article number)en
dc.identifier.doihttps://doi.org/10.1063/5.0215566en
dc.identifier.eissn1077-3118en
dc.identifier.issn0003-6951en
dc.identifier.issue8en
dc.identifier.orcidPaul, Mark [0000-0002-0701-1955]en
dc.identifier.urihttps://hdl.handle.net/10919/121279en
dc.identifier.volume125en
dc.language.isoenen
dc.publisherAIP Publishingen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.titleMode-dependent scaling of nonlinearity and linear dynamic range in a NEMS resonatoren
dc.title.serialApplied Physics Lettersen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten
dc.type.otherArticleen
dc.type.otherJournalen
pubs.organisational-groupVirginia Techen
pubs.organisational-groupVirginia Tech/Engineeringen
pubs.organisational-groupVirginia Tech/Engineering/Mechanical Engineeringen
pubs.organisational-groupVirginia Tech/All T&R Facultyen
pubs.organisational-groupVirginia Tech/Engineering/COE T&R Facultyen

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