Nanopore/Nanotube Pattern Formation through Focused Ion Beam Guided Anodization

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dc.contributor.authorTian, Zhipengen
dc.contributor.committeechairLu, P. Kathyen
dc.contributor.committeememberAning, Alexander O.en
dc.contributor.committeememberClark, David E.en
dc.contributor.departmentMaterials Science and Engineeringen
dc.date.accessioned2014-03-14T21:51:25Zen
dc.date.adate2011-01-15en
dc.date.available2014-03-14T21:51:25Zen
dc.date.issued2010-12-01en
dc.date.rdate2011-01-15en
dc.date.sdate2010-12-14en
dc.description.abstractAnodization is a kind of method that can produce oxide layer in a large area and on flexible shaped metals. In some specific conditions, anodic oxide layers exhibit interesting nanopore/nanotube structures. In this work, focused ion beam patterning method is introduced to general anodization, aiming to make highly ordered anodic porous alumina and titania nanotubes. Focused ion beam guided porous anodic alumina is carried out by pre-designing hexagonal and square guiding patterns with different interpore distances on well electropolished Al foil before anodization. After anodization, the guiding interpore distance is found to affect the new pores' locations and shapes. Two important elements, electrical field and mechanical stress, are discussed for the development of the guiding pores and the generation of new pores. Based on the proposed pore growth mechanism, novel patterns, non-spherical pores, and large patterns across the grain boundaries are successfully produced. The research on focused ion beam guided anodic titania nanotubes begins with surface polishing. The influence of four polishing conditions, as-received, chemically polished, mechanically polished, and electropolished samples, are investigated. A polished smooth sample provides a desired surface for focused ion beam guided anodization. Hexagonal guiding patterns with different interpore distances are created on Ti surface. Ordered nanotube arrays are produced, and the structure of the anodized guiding pattern is identified.en
dc.description.degreeMaster of Scienceen
dc.identifier.otheretd-12142010-150936en
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-12142010-150936/en
dc.identifier.urihttp://hdl.handle.net/10919/46207en
dc.publisherVirginia Techen
dc.relation.haspartTian_Z_T_2010.pdfen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectTitania Nanotubeen
dc.subjectPorous Aluminium Oxideen
dc.subjectPatterningen
dc.subjectAnodizationen
dc.subjectFocused Ion Beamen
dc.titleNanopore/Nanotube Pattern Formation through Focused Ion Beam Guided Anodizationen
dc.typeThesisen
thesis.degree.disciplineMaterials Science and Engineeringen
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen
thesis.degree.levelmastersen
thesis.degree.nameMaster of Scienceen

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