Development of a Miniature, Fiber-optic Temperature Compensated Pressure Sensor

Since the invention of Laser (in 1960) and low loss optical fiber (in 1966) [1], extensive research in fiber-optic sensing technology has made it a well-defined and matured field [1]. The measurement of physical parameters (such as temperature and pressure) in extremely harsh environment is one of the most intriguing challenges of this field, and is highly valued in the automobile industry, aerospace research, industrial process monitoring, etc. [2]. Although the semiconductor based sensors can operate at around 500oC, sapphire fiber sensors were demonstrated at even higher temperatures [3].

In this research, a novel sensor structure is proposed that can measure both pressure and temperature simultaneously. This work effort consists of design, fabrication, calibration, and laboratory testing of a novel structured temperature compensated pressure sensor. The aim of this research is to demonstrate an accurate temperature measurement, and pressure measurement using a composite Fabry-Perot interferometer. One interferometer measures the temperature and the other accurately measures pressure after temperature compensation using the temperature data from the first sensor.